| 复合热释电薄膜红外探测器的制备和性能测试 |
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| 引用本文： | 王三红,吴小清,姚熹.复合热释电薄膜红外探测器的制备和性能测试[J].西安交通大学学报,2001,35(2):146-148. |
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| 作者姓名： | 王三红 吴小清 姚熹 |
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| 作者单位： | 西安交通大学电子与信息工程学院, |
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| 基金项目： | 国家自然科学基金资助项目（69777018）． |
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| 摘 要： | 为解决热释电薄膜红外探测器中的热损失问题，引入了复合热释电薄膜的概念．它利用多孔二氧化硅具有的低热导率特点，有效地减少了热量从热释电层向衬底的热扩散．利用溶胶-凝胶和金属有机物热分解等工艺制备的复合热释电薄膜红外探测器，在温度为420K、频率为10Hz时，电压响应率约为1400V／W，探测器的星探测率D
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| 关 键 词： | 红外探测器 复合热释电薄膜 溶胶－凝胶 电压响应率 星探测率 |
| 文章编号： | 0253-987X（2001）02-0146-03 |
| 修稿时间： | 2000年7月5日 |
Fabrication and Properties
of the Multi-layer Pyroelectric Thin Film Infrared Detectors |
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| Wang Sanhong,Wu Xiaoqing,Yao Xi.Fabrication and Properties
of the Multi-layer Pyroelectric Thin Film Infrared Detectors[J].Journal of Xi'an Jiaotong University,2001,35(2):146-148. |
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| Authors: | Wang Sanhong Wu Xiaoqing Yao Xi |
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| Abstract: | In order to reduce the thermal dissipation from the pyroelectric film to the substrate and meet the needs of integration with silicon, the multi layer pyroelectric thin film (MPTF) was introduced. It is mainly composed of pyroelectric sensitive layer lead titanate, thermal isolating layer porous silicon dioxide film, and the buffer layer dense silicon dioxide film. A pyroelectric measuring system was built to measure the infrared response of the detector. The voltage response and the specific detectivity of the detector were also given. |
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| Keywords: | infrared detector multi layer pyroelectric thin film sol gel voltage response specific detectivity |
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