| 阵列波导光栅薄膜的制备及性能 |
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| 引用本文： | 南铮,夏洋,于广华.阵列波导光栅薄膜的制备及性能[J].北京科技大学学报,2003,25(5):445-448. |
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| 作者姓名： | 南铮 夏洋 于广华 |
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| 作者单位： | 1. 中国科学院微电子中心,北京,100029
2. 北京科技大学材料物理系,北京,100083 |
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| 基金项目： | 国家自然科学基金;69936020; |
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| 摘 要： | 以一种特定成分的有机硅为原料，采用溶胶-凝胶法，在硅基片上制备出用于光波导器件的薄膜．通过折射率和厚度测试及XPS成分测试验证了此薄膜具有较好的均匀性、厚度和光学特性，满足光波导器件的要求．分析了溶胶-凝胶法中常见的龟裂现象的原因以及采预防方法．利用这种薄膜结合微电子加工工艺制备出光波导器件阵列波导光栅．
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| 关 键 词： | 阵列波导光栅 薄膜 制备 有机硅化合物 溶胶-凝胶法 光波导 |
| 修稿时间： | 2003年1月16日 |
Fabrication and Performance of Membrane in Arrayed Waveguide Grating |
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| NAN Zheng,XIA Yang,YU Guanghua
Microelectronics R&D Center,Chinese Academy of Science,Beijing ,China
Materials Science and Engineering School,University of Science and Technology,Beijing ,China.Fabrication and Performance of Membrane in Arrayed Waveguide Grating[J].Journal of University of Science and Technology Beijing,2003,25(5):445-448. |
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| Authors: | NAN Zheng XIA Yang YU Guanghua
Microelectronics R&D Center Chinese Academy of Science Beijing China
Materials Science and Engineering School University of Science and Technology Beijing China |
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| Institution: | NAN Zheng,XIA Yang,YU Guanghua
1) Microelectronics R&D Center,Chinese Academy of Science,Beijing 100029,China
2) Materials Science and Engineering School,University of Science and Technology,Beijing 100083,China |
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| Abstract: | Waveguide membrane on Si basement was fabricated by So-Gel method with a special kind of organic Si as raw material. After a serial of tests including thickness test, optical test and XPS test, it was concluded that this membrane was thick enough and has good quality. Since Sol-Gel method always causes chap and split, a method how to deal with it was discussed. Finally, how to fabricate an arrayed waveguide grating with the membrane was also introduced. |
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| Keywords: | organic Si Sol-Gel method arrayed waveguide grating (AWG) waveguide membrane |
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