| A New Edge-directed Subpixel Edge Localization Method |
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| 作者姓名： | 于新瑞 徐威 王石刚 李倩 |
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| 作者单位： | Research Center for Microelectronic Equipment，Shanghai Jiaotong University，Shanghai，200030，Dr，Research Center for Microelectronic Equipment，Shanghai Jiaotong University，Shanghai，200030，Research Center for Microelectronic Equipment，Shanghai Jiaotong University，Shanghai，200030，Research Center for Microelectronic Equipment，Shanghai Jiaotong University，Shanghai，200030 |
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| 基金项目： | FundedbyNationalNaturalScienceFoundation (5 0 3 75 0 99& 5 0 3 90 0 64 )andtheDoctoralProgramofHigherEducation (2 0 0 2 0 2 480 48) |
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| 摘 要： | IntroductionComparedtotraditionalindustry ,microelectronicfab ricationhasthreecharacteristics :highcomplexity ,highprecisionandhighautomatization .Tomeettheprecision ,speedandreliabilityrequirements,machinevisiontech niques,suchasvisionaidedinspectionandregistration ,havebeenintroducedineveryworkingprocedureofinte grated circuitfabricationandsurfacemounttechnology(SMT) .Inspectionandregistrationprecisionmustbecon stantlyincreasedasthesizeofthecomponentbecomessmallerandsmaller .Therefore ,the…
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A New Edge-directed Subpixel Edge Localization Method |
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| YU Xin-rui,XU Wei,WANG Shi-gang,LI QianResearch Center for Microelectronic Equipment,Shanghai Jiaotong University,Shanghai.A New Edge-directed Subpixel Edge Localization Method[J].Journal of Donghua University,2004,21(4). |
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| Authors: | YU Xin-rui XU Wei WANG Shi-gang LI QianResearch Center for Microelectronic Equipment Shanghai Jiaotong University Shanghai |
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| Institution: | Research Center for Microelectronic Equipment,Shanghai Jiaotong University,Shanghai,200030 |
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| Abstract: | Localization of the inspected chip image is one of the key problems with machine vision aided surface mount devices (SMD) and other micro-electronic equipments. This paper presents a new edge-directed subpixel edge localization method. The image is divided into two regions, edge and non-edge, using edge detection to emphasize the edge feature. Since the edges of the chip image are straight, they have straight-line characteristics locally and globally. First,the line segments of the straight edge are located to subpixel precision, according to their local straight properties, in a 3 × 3 neighborhood of the edge region. Second, the subpixel midpoints of the line segments are computed. Finally, the straight edge is fitted using the midpoints and the least square method, according to its global straight property in the entire edge region. In this way, the edge is located to subpixel precision. While fitting the edge, the irregular points are eliminated by the angles of the line segments to improve the precision. We can also distinguish different edges and their intersections using the angles of the line segments and distances between the edge points, then give the vectorial result of the image edge with high precision. |
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| Keywords: | edge-directed straight edge subpixel image localization micro-electronic fabrication |
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