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The Effect of Discharge Power on the 02/TICl4 Plasma Deposition of TiO2 Atmospheric Pressure Non-equilibrium Ar/ Film |
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| Authors: | WANG De-xin YANG Qin-yu GUO Ying DING Ke ZHANG Jing |
| Institution: | [1]State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, College of Material Science and Engineering, Donghua University, Shanghai 201620, China [2]College of Science, Donghua University, Shanghai201620, China |
| Abstract: | |
| Keywords: | atmospheric pressure non-equilibrium Ar/ O2/ TiCl4 plasma TiO2 discharge power |
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