LiSiPON固态薄膜电解质的结构和性能分析

以Li3PO4和Si3N4为靶材,利用离子束辅助沉积N离子流轰击法制备非晶结构的固态电解质LiSiPON薄膜.实验中,通过控制N2气和Ar气的流量比,调节薄膜的含氮量.利用X线衍射、X线能量色散谱仪和X线光电子能谱仪研究薄膜的结构和组织成分的变化,并通过电化学阻抗测试仪获得薄膜的离子电导率,研究不同氮氩比对LiSiPON薄膜结构、组成和电学性质的影响.结果表明:N2和Ar流量比为1∶1时,薄膜含氮量最高,离子电导率达到最大值,在室温时电解质薄膜的离子电导可达6.8×10-6S/cm,是一种有潜力应用于全固态薄膜锂离子电池的电解质材料.

Synthesis on microstructures and properties of LiSiPON solid state electrolyte thin films

Amorphous Nitrogen-incorporated Lithium Silicophosphate （LiSiPON） solid state electrolyte thin films were prepared by ion beam assisted deposition （IBAD）, using Li3PO4 and Si3N4 targets in nitrogen reactive plasma. The nitrogen content of the film was adjusted by the control of N2 and Ar flow ratio. The variation of LiSiPON thin film structure and composition were investigated by X-ray diffraction, X-ray energy dispersive spectrometer and X-ray photoelectron spec- trometer, ion conductivity of the film was achieved by electrochemical impedance tester, the influence of flow ratio of N2 to Ar on the structure, composition and electrical properties of the LiSiPON thin film were investigated. Results showed that the nitrogen content of thin film was the highest when FN2 ： FA~=I ： 1, as well as Li＋ ion conductivity was the maximum. The ion conductivity of LiSiPON electrolyte thin film was 6.8×10^- S/cm at room temperature, it was a promising electrolyte materials for all-solid-state thin film lithium ion batteries.