| ZnO基透明导电薄膜制备方法研究进展 |
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| 引用本文： | 谭天亚,江雪,崔春阳,李春梅,徐广文,吴炜,郭永新.ZnO基透明导电薄膜制备方法研究进展[J].辽宁大学学报(自然科学版),2007,34(4):334-338. |
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| 作者姓名： | 谭天亚 江雪 崔春阳 李春梅 徐广文 吴炜 郭永新 |
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| 作者单位： | 辽宁大学,物理学院,沈阳市光电子功能器件与检测技术重点实验室,辽宁,沈阳,110036 |
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| 基金项目： | 辽宁大学科研启动基金资助项目（408041）. |
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| 摘 要： | ZnO基透明导电薄膜与掺锡氧化铟薄膜（ITO）相比，不仅性能与其相似，还具有ITO很多无法比拟的优点．因此，制备ZnO基透明导电薄膜成为当今研究热点．综述了ZnO基透明导电薄膜制备方法的研究进展，并对各自的优缺点进行了讨论．
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| 关 键 词： | 透明导电薄膜 ZnO 制备方法 电阻率 透射率 |
| 文章编号： | 1000-5846（2007）04-0334-05 |
| 修稿时间： | 2007-01-22 |
Progress of Deposition Techniques for ZnO-based Transparent Conductive Thin Films |
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| TAN Tian-ya,JIANG Xue,CUI Chun-yang,LI Chun-mei,XU Guang-wen,WU Wei,GUO Yong-xin.Progress of Deposition Techniques for ZnO-based Transparent Conductive Thin Films[J].Journal of Liaoning University(Natural Sciences Edition),2007,34(4):334-338. |
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| Authors: | TAN Tian-ya JIANG Xue CUI Chun-yang LI Chun-mei XU Guang-wen WU Wei GUO Yong-xin |
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| Institution: | Shenyang Key Laboratory of Photoelectronic Devices and Detection Technology, College of Physics, Liaoning University, Shenyang 110036, China |
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| Abstract: | Compared with the ITO thin film, ZnO- based transparent conductive thin film is not only similar to it in the performance, but also has the merits which are better than ITO. So the preparing of ZnO- based transparent conductive thin film becomes a hot topic. In this paper, a review on the progress of preparation methods of ZnO-based transparent conductive thin films is presented, and the advantages, disadvantages of deposition techniques are discussed in detail. |
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| Keywords: | transparent conductive thin films ZnO deposition technique resistivity transmittance |
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