多孔SiO2减反射薄膜的低温制备及光伏应用

采用溶胶凝胶法，使用氨水催化前驱物正硅酸乙酯（TEOS）水解制备SiO2胶体。通过改变溶液浓度调节胶体粒子大小，旋涂低温制备不同折射率纳米多孔SiO2薄膜。使用激光粒度仪和透射电镜分析胶粒大小及分布，粒子分布均匀且在几十纳米范围；使用椭圆偏振仪、紫外/可见分光光度计、扫描电子显微镜表征减反射薄膜的光学性质和表面形貌，发现薄膜表面呈颗粒状且折射率较低，在400nm至800nm波段的透过率平均提高了4%。将溶胶涂在CdS/CdTe太阳电池基底背面，测试结果发现，使用减反射薄膜后电池吸收波段内量子效率（QE）提高，短路电流密度提高了4.45%；光电转换效率由11.50%提高到11.94%。

Preparation of porous SiO2 antireflection at low temperature and application to solar cell

SiO2 colloids were prepared by sol-gel methods with TEOS as precursor and ammonia as catalyst. Different sizes of SiO2 colloids were obtained by changing the concentration of the solutions, and then nano-porous SiO2 anti-reflection films were prepared by spin coating methods at low temperature. The TEM and Laser particle sizer indicated the particle distribution was uniform and its size was about tens of nanometers. The optical properties and surface morphology of the films were examined by ellipsometry, UV / visible spectrophotometer, SEM. It could be found that the film surface was porous and the transmittance increasesd an average of 4% in the range from 400nm to 800nm. The optimized process was used to prepare anti-reflection films on the backsides of CdTe thin film solar cells. It could be found that the short-circuit current density of solar cells with anti-reflection coatings increased by 4.45% compared with that without anti-reflection coatings, and the photoelectric conversion efficiency increased from 11.50% to 11.94%.