微秒级脉冲辉光放电中离子产生过程的飞行时间质谱研究

用自制飞行时间质谱仪研究了微秒级脉冲辉光放电中样品离子与基底气体离子的形成过程．气体离子和样品离子的的产生存在着时间上的差异，气体主要通过与电子的碰撞而离子化，形成于脉冲放电期间；而样品原子必须先被溅射出来，再主要通过与能量较高的粒子（氩的亚稳态原子）的碰撞而被离子化，形成于脉冲放电终止以后．文中提出了微秒级脉冲辉光放电中离子的扩散及传输模型，并对结果进行了分析和讨论．

Study of Ion production Processes in Microsecond pulse Glow Discharge with Time of Flight Mass Spectrometry

The ion production processes in microsecond pulse glow discharge are studied with a home made time of flight mass spectrometer. Gas species and sputtered materials are found to be ionized at different time regimes. Gas ions are produced during pulse on regime by electronic impact, however, sample atoms should first be sputtered off the sample and surface then be ionized by Penning ionization at tens of microseconds after the pulse off regime. An ion diffusion and transmission model in microsecond pulse glow discharge plasma is raised and discussed.