| 大口径光学元件微纳加工与检测技术研究与应用 |
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| 引用本文： | 郭隐彪,王振忠,彭云峰,杨炜,毕果.大口径光学元件微纳加工与检测技术研究与应用[J].厦门大学学报(自然科学版),2011,50(2):286-292. |
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| 作者姓名： | 郭隐彪 王振忠 彭云峰 杨炜 毕果 |
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| 作者单位： | 厦门大学,物理与机电工程学院,微纳米加工与检测联合实验室,福建,厦门,361005 |
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| 基金项目： | 国家高技术研究发展计划(863)重点项目(2008AA042501); 国家自然科学基金项目(51075343,50905150); 福建省科技重大专项(2006HZ0002-4); 福建省自然科学基金资助项目(2010J05122) |
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| 摘 要： | 超精密金刚石砂轮磨削是大口径先进光学元件微纳加工的主要技术,是实现确定性批量加工的重要保证.以实现高精度、高效率、高自动化程度加工为目的,阐述了大口径光学元件微纳加工与检测的加工技术系统,详细分析高精度加工设备及工艺控制、大尺寸检测、加工环境监控、快速抛光、表面织构化等研究应用情况.
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| 关 键 词： | 微纳米加工 检测 超精密加工装备 快速抛光 加工监控 表面织构化 |
Research on the Key Technology of Micro/nano Machining and Measuring |
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| GUO Yin-biao,WANG Zhen-zhong,PENG Yun-feng,YANG Wei,BI Guo.Research on the Key Technology of Micro/nano Machining and Measuring[J].Journal of Xiamen University(Natural Science),2011,50(2):286-292. |
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| Authors: | GUO Yin-biao WANG Zhen-zhong PENG Yun-feng YANG Wei BI Guo |
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| Institution: | GUO Yin-biao*,WANG Zhen-zhong,PENG Yun-feng,YANG Wei,BI Guo(Unite Laboratory of Micro/nano machining and measuring,School of Physics and Mechanical & Electrical Engineering,Xiamen University,Xiamen 361005,China) |
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| Abstract: | Ultra precision grinding with diamond wheel is widely used for manufacture of large scale optical lens,especially for batch processing,as the key technology of micro/nano machining and measuring.This paper presents the technical system of micro/nano machining and measuring for large-scale optical manufacture,and introduces the studies of the research team in Xiamen University in the field of advanced optical machining,precision machine tool,micro/nano measuring,fast controllable polishing,machining environm... |
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| Keywords: | micro/nano machining measuring ultra-precision machine tool fast polishing machining monitoring textured surface fabricating |
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