| 溅射法制备硫化锌薄膜的探索 |
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| 引用本文： | 柳兆洪,孙书农.溅射法制备硫化锌薄膜的探索[J].厦门大学学报(自然科学版),1997,36(1):52-56. |
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| 作者姓名： | 柳兆洪 孙书农 |
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| 作者单位： | 物理学系 |
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| 摘 要： | 利用射频磁控溅射法制备硫化锌薄膜，用Ｘ射线衍射、透射电镜、研究薄膜的结构相变，揭示了硫化锌薄膜的微观结构和相变特征．
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| 关 键 词： | 射频磁控溅射，微观结构，相变特征 |
Researches on Zinc Sulfide Thin Film Prepared by RF Magnetron Sputtering |
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| Liu Zhaohong,Sun Shunong,Wang Yujiang,Chen Zenxiang,Liu Reitang.Researches on Zinc Sulfide Thin Film Prepared by RF Magnetron Sputtering[J].Journal of Xiamen University(Natural Science),1997,36(1):52-56. |
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| Authors: | Liu Zhaohong Sun Shunong Wang Yujiang Chen Zenxiang Liu Reitang |
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| Institution: | Dept. of Phys. |
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| Abstract: | The zinc sulfide thin film are prepared by radio frequence magnetron sputtering (RFSP). The structure and phase transition of film are evaluated with X ray diffraction (XRD) and transmission electronmicroscope (TEM). The researches show some characteristics of micro structure and phase transition of ZnS thin film prepared by RFSP. All of these can be used to gain understanding of the mechanism of TFEL and to find new EL material with high brightness. |
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| Keywords: | Radio frequence magnetron sputtering Micro structure Phase transition characterization |
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