| CVD反应器内基座倾斜时流场的有限分析方法数值计算 |
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| 引用本文： | 郭庆尧,金希卓.CVD反应器内基座倾斜时流场的有限分析方法数值计算[J].吉林大学学报(理学版),1993(4). |
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| 作者姓名： | 郭庆尧 金希卓 |
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| 作者单位： | 吉林大学数学系，吉林大学数学系 长春 130023，长春 130023 |
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| 摘 要： | 本文用有限分析方法,对带有倾斜基座的CVD反应器内流场进行了数值计算.结果表明,有限分析方法对于小倾角的非矩形边界的解域也是适用的.
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| 关 键 词： | 化学汽相淀积(CVD) 倾斜基座 有限分析方法 数值模拟 |
The Numerical Computation of Finite Analytic Method on the Flow Field in CVD Reactor with Tilted Susceptor |
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| Guo Qingyao,Jin Xizhuo.The Numerical Computation of Finite Analytic Method on the Flow Field in CVD Reactor with Tilted Susceptor[J].Journal of Jilin University: Sci Ed,1993(4). |
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| Authors: | Guo Qingyao Jin Xizhuo |
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| Abstract: | Using finite analytic solution we gave the numerical computation of the flow field in CVD reactor with tilted susceptor. The results in this paper show that the finite analytic method is suitable for the solvable ragion of the non-rectangular boundary with minor tilted angle. |
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| Keywords: | chemical vapor deposition (CVD) tilted susceptor finite analytic method numerical simulation |
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