| 用热解CVD方法合成的金刚石的结晶特性 |
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| 引用本文： | 金曾孙,吕宪义,皇甫萍,曲承林,康翰卿,邹广田.用热解CVD方法合成的金刚石的结晶特性[J].吉林大学学报(理学版),1988(3). |
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| 作者姓名： | 金曾孙 吕宪义 皇甫萍 曲承林 康翰卿 邹广田 |
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| 作者单位： | 吉林大学原子与分子物理研究所
(金曾孙，吕宪义，皇甫萍，曲承林，康翰卿)，吉林大学原子与分子物理研究所(邹广田) |
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| 摘 要： | 本文研究了用热解CVD方法合成的金刚石的结晶特性,并与用高温高压法合成的金刚石的结晶特性做了比较。
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| 关 键 词： | 金刚石薄膜 结晶特性 热解CVD方法 |
The Crystalline Characteristic of Diamond Synthesized by Thermal CVD Method |
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| Jin Zengsun,Lu Xianyi,Huang Fuping,Kang Hangqing and Zou Guangtian.The Crystalline Characteristic of Diamond Synthesized by Thermal CVD Method[J].Journal of Jilin University: Sci Ed,1988(3). |
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| Authors: | Jin Zengsun Lu Xianyi Huang Fuping Kang Hangqing and Zou Guangtian |
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| Abstract: | In persent paper, the crystalline characteristics of diamond synthesized by thermal CVD method was studied, and compared with that of diamond synthesized by high temperature andhigh pressure method. |
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| Keywords: | diamond thin film crystalline characteristic thermal CVD mehod |
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