| 硅基微结构气体传感器结构的有限元模拟分析 |
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| 引用本文： | 杨广立,张彤,李春明.硅基微结构气体传感器结构的有限元模拟分析[J].吉林大学学报(理学版),2003,41(4):510-512. |
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| 作者姓名： | 杨广立 张彤 李春明 |
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| 作者单位： | 1. 吉林大学电子科学与工程学院, 长春 130023; 2. 中国科学院光机与物理研究所, 长春 130022 |
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| 基金项目： | 国家自然科学基金 (批准号 :60 10 40 0 6) . |
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| 摘 要： | 利用金属铂的热阻、 热敏特性, 以及SiO2和SiNx良好的绝 热、 绝缘特性, 设计一种以铂丝为加热层, 叉指状的金电极为敏感膜信号电极, SiO2和SiNx为隔热和电绝缘层的硅基微热板结构气敏元件. 并利 用有限元分析工具ANSYS, 对所设计的硅基微结构气敏元件的加热器进行了稳态过程和瞬态 过程的模拟和分析, 得到了元件表面的稳态热场分布和瞬态响应的分析结果.
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| 关 键 词： | 微加热器 有限元分析 稳态 瞬态 温度场 响应时间 |
| 文章编号： | 1671-5489(2003)04-0510-03 |
| 收稿时间： | 2003-04-04 |
| 修稿时间： | 2003年4月4日 |
FEA Simulation and Analysis of Si-substrated Micro-Structural Gas Sensor |
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| YANG Guang-li,ZHANG Tong.FEA Simulation and Analysis of Si-substrated Micro-Structural Gas Sensor[J].Journal of Jilin University: Sci Ed,2003,41(4):510-512. |
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| Authors: | YANG Guang-li ZHANG Tong |
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| Institution: | 1. College of Electronics Science and Engineering, Jilin University, Changchun 130023, China;2. Changchun Institute of Optics and Fine Mechanics Physics, Chinese Academy, Changchun 130022, China |
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| Abstract: | Considering of the thermal resistant and sensitive characteristics of metal platinum, as well as the heat and electricity insulating characteristics of SiO_2 and SiN_x, we designed a kind of the Si-substrated micro structural gas sensor, which used platinum filament as heater, gold electrodes with crossing fingers shape as sensitive film electrodes, SiO_2 and SiN_x as thermal and electricity insulation. Then we simulated and analyzed the static and the transient processes of the heater of the Si-substrated micro structural gas sensor using the finite element analysis (FEA) tool ANSYS. The perfect results of the static temperature distributing and the transient response have been obtained. |
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| Keywords: | MHP(micro-hotplate) FEA(finite element analysis) static transient temperature distributing response time |
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