| 基于红外技术的薄膜厚度在线检测系统的设计 |
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| 引用本文： | 何平,曹胜梅,李岐,华楠.基于红外技术的薄膜厚度在线检测系统的设计[J].哈尔滨商业大学学报(自然科学版),2013(6):674-677. |
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| 作者姓名： | 何平 曹胜梅 李岐 华楠 |
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| 作者单位： | 哈尔滨工业大学航天学院控制科学与工程系,哈尔滨150001 |
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| 摘 要： | 介绍了红外透射式检测原理,以TMS320F2812为主控芯片设计了薄膜厚度信号的采集计算系统,主要包括信号采集、信号调理、A/D转换,数据处理、串口通信等,设计了人机交互系统来实现数据的实时显示.实验结果表明,基于红外技术的薄膜测厚系统能够实现对薄膜厚度的实时检测,具有精度高,抗干扰性强,人机界面友好等特点,功能和指标都达到了设计要求.
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| 关 键 词： | 红外技术 薄膜厚度 实时检测 TMS320F2812 |
On-line detection system of film thickness based on infrared technology |
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| HE Ping,CAO Sheng-mei,LI Qi,HUA Nan.On-line detection system of film thickness based on infrared technology[J].Journal of Harbin University of Commerce :Natural Sciences Edition,2013(6):674-677. |
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| Authors: | HE Ping CAO Sheng-mei LI Qi HUA Nan |
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| Institution: | (Department of Control Science and Engineering, Harbin Institute of Technology, Harbin 150001, China) |
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| Abstract: | The principle of film thickness detection based on infrared transmission was pres- ented. Then signal acquisition and computing system for the film thickness was designed with TMS320F2812. The system consists of the signal acquisition, the signal modulating, the A/ D converting and serial communication circuits. The human-computer interaction system was designed to realize the real-time display of data. The results showed that detection system of film thickness based on infrared technology can realize the real-time detection for film thick- ness, and have advantages of high precision, strong resistance to interference, and well hu- man-computer interface. The functions and indexes achieved the design requirements. |
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| Keywords: | infrared technology film thickness real-time detection TMS320F2812 |
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