| 对微机电系统发展趋势和面临挑战的思考 |
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| 引用本文： | 张栋.对微机电系统发展趋势和面临挑战的思考[J].科技情报开发与经济,2006,16(24):180-181. |
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| 作者姓名： | 张栋 |
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| 作者单位： | 中北大学,山西太原,030051 |
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| 摘 要： | 近年来,微机电系统在技术进步和应用数量上有了长足的发展。介绍了微机电系统的特点,分析了微机电系统的发展趋势,对微机电系统面临的挑战进行了探讨。
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| 关 键 词： | 前沿学科 微机电系统 发展趋势 |
| 文章编号： | 1005-6033（2006）24-0180-02 |
| 收稿时间： | 2006-07-15 |
| 修稿时间： | 2006年7月15日 |
Consideration about the Developing Trend of and the Challenges Faced by the Micro Electromechanical Systems (MEMS) |
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| ZHANG Dong.Consideration about the Developing Trend of and the Challenges Faced by the Micro Electromechanical Systems (MEMS)[J].Sci-Tech Information Development & Economy,2006,16(24):180-181. |
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| Authors: | ZHANG Dong |
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| Abstract: | In the last few years,the MEMS have been greatly developed in the technical progress and application quantity.This paper introduces the features of the MEMS,analyzes on the developing trend of the MEMS,and probes into the challenges faced by the MEMS. |
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| Keywords: | frontal subject MEMS developing trend |
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