连接式微摩擦测试机构及设计

为了能够比较真实地模拟微机电器件侧面摩擦副之间的摩擦磨损状况,进而对M EM S器件的摩擦学规律进行研究,设计了一种基于单晶硅材料的片上微摩擦测试机构。利用微机械体硅工艺及键合技术,把系统中的测试机构、加载机构以及力传感器集成在一个单一的芯片上。对结构的临界驱动电压、静态摩擦力及正压力进行了理论推导。最后,在显微镜下对该机构的静态摩擦因数进行了测试。测试结果表明:随着施加在摩擦副上的正压力的增加,摩擦因数相应减小。

A connected-type micro-tribotester and its design

An on-chip micro-tribotester was developed to simulate the friction and wear properties on lateral contact surfaces of single crystal silicon based MEMS devices.In this system,the loading structure,frictional pair and force sensors are all integrated on a single chip using bulk silicon processing and bonding technologies.The critical driving voltage,static friction force and normal force are all calculated theoretically.The static frictional coefficient of the tribotester was then measured under a microscope to show that the static frictional coefficient decreases with increasing normal force.