| 光学轮廓仪测量原理及其误差分析 |
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| 引用本文： | 高宏,薛实,李庆祥,严普强.光学轮廓仪测量原理及其误差分析[J].清华大学学报(自然科学版),1992(2). |
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| 作者姓名： | 高宏 薛实 李庆祥 严普强 |
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| 作者单位： | 精密仪器与机械学系
(高宏，李庆祥)，福精密仪器与机械学系
(薛实)，精密仪器与机械学系(严普强) |
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| 摘 要： | 文中介绍了光学轮廓仪的测量原理及其误差分析。提出了一种干涉相位差与检偏器方位角成线性关系的微分干涉显微镜．应用相移干涉技术，实现了对表面轮廓的高精度测量。由于采用了共光路干涉体系，仪器对机械振动等外界干扰不敏感，在一般场合下测量精度可优于 １ｎｍ。
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| 关 键 词： | 表面轮廓 表面粗糙度 精密测量 表面计量 |
Principles and error analysis of optical profiler |
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| Gao Hong,Xue Shifu,Li Qingxiang,Yan Puqiang.Principles and error analysis of optical profiler[J].Journal of Tsinghua University(Science and Technology),1992(2). |
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| Authors: | Gao Hong Xue Shifu Li Qingxiang Yan Puqiang |
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| Institution: | Department of Precision Instruments and Mechanology |
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| Abstract: | The principles and error analysis of an optical profiler are described in this paper. A differential interference microscope was developed. The phase difference between two interfering beams in the microscope is linear with the azimuth angle of analyzer. High precision measurement of surface profile was achieved by using PSI (phase shifting interferometry). Adopting a commonpath interfering scheme, the instrument, is insensitive to vibration and can operate with an accuracy better than 1mm in an orbinary laboratory environment. |
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| Keywords: | surface profile surface roughness precision measurement surface metrology |
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