以SiHCl3为工作介质生产高丰度28Si

为了获得高丰度的28S i同位素,生产高纯度的单晶硅,利用气体离心机对硅同位素进行离心分离。通过对S iH-C l3中组成元素的不同同位素丰度的分析,计算了天然S iH-C l3中不同相对分子质量的分子组成。分析结果表明:虽然氯有两种同位素,但也可以将S iHC l3作为分离28S i同位素的工作介质。通过4台离心级联的分离实验,得到了28S i丰度达到99%的S iHC l3样品。离心分离得到的高丰度S iHC l3不用经过化学转化就可以直接用于单晶硅的生产。实验结果表明,采用离心法分离S iHC l3可以得到高丰度28S i。

Production of highly enriched 28Si using SiHCl3 as the processing gas

Silicon isotopes were separated in a gas centrifuge to produce highly enriched~(28)Si) isotope.The molecule compositions of SiHCl_3 with various combinations of the isotopes of the three elements were calculated based on the abundance of the various isotopes.The results indicate that despite chlorine having two isotopes,SiHCl_3 can still be used as a processing gas to separate the(()~(28)Si) isotope.Experiments using a cascade of four gas centrifuges enriched the(()~(28)Si) fraction to 99% using SiHCl_3.Highly enriched SiHCl_3 from the centrifugal separation was then directly used in the production of silicon without additional chemical conversion.The results show that highlyenriched(()~(28)Si) can be obtained by centrifugal separation of SiHCl_3.