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磁控溅射制备Ag/TiO2复合薄膜的光催化降解性能
引用本文:侯亚奇,庄大明,张弓,吴敏生.磁控溅射制备Ag/TiO2复合薄膜的光催化降解性能[J].清华大学学报(自然科学版),2004,44(5):589-592.
作者姓名:侯亚奇  庄大明  张弓  吴敏生
作者单位:清华大学,机械工程系,北京,100084
基金项目:面向21世纪教育振兴行动计划(985计划)
摘    要:为了提高TiO2薄膜的光催化效率,利用中频交流磁控溅射技术,采用Ti和Ag金属靶制备了Ag/TiO2复合薄膜.利用X射线光电子能谱、 X射线衍射和扫描电子显微镜分析了复合薄膜的成分、结构和表面形貌,并研究了其光催化降解性能.结果发现: Ag在厚度较薄时以聚集颗粒形式存在; 在Ag膜厚度为15 nm时, Ag/TiO2复合薄膜与TiO2薄膜相比其光催化效率可提高2倍; Ag/TiO2复合薄膜对亚甲基蓝的光催化降解效率与复合薄膜的透射率均随Ag膜厚度增加逐渐下降,其原因是Ag膜厚度不断增加,最终完全覆盖TiO2薄膜表面,阻挡了TiO2薄膜与污染物的有效接触, Ag作为光生电子捕获剂的有利影响消失.

关 键 词:Ag/TiO2复合薄膜  中频交流磁控溅射  光催化降解  亚甲基蓝
文章编号:1000-0054(2004)05-0589-04
修稿时间:2004年3月4日

Photocatalytic degradation properties of Ag/TiO2 composite films prepared by magnetron sputtering
HOU Yaqi,ZHUANG Daming,ZHANG Gong,WU Minsheng.Photocatalytic degradation properties of Ag/TiO2 composite films prepared by magnetron sputtering[J].Journal of Tsinghua University(Science and Technology),2004,44(5):589-592.
Authors:HOU Yaqi  ZHUANG Daming  ZHANG Gong  WU Minsheng
Abstract:Ag/TiO2 composite films were successfully prepared using a mid-frequency AC magnetron sputtering technique with pure Ti and Ag targets to increase photocatalytic efficiencies of TiO2 films. X-ray photoelectron spectroscopy, scanning electron microscopy, and X-ray diffraction were used to examine the compositions, surface morphologies, and microstructures of the Ag/TiO2 composite films. The photocatalytic degradation of the Ag/TiO2 composite films was investigated using methylene blue (MB) as the degradation objective. The results show that the Ag film is composed of separate Ag particles when its thickness is lower than 15 nm. Because Ag is an effective capturer of photo-induced electrons, the photocatalytic degradation rate of the Ag/TiO2 composite film is three times the degradation rate of a TiO2 film with the same parameters. The photocatalytic degradation rate and transmittance of the Ag/TiO2 composite film decrease with increasing Ag film thickness since the thicker Ag films cover the entire TiO2 film surface. The Ag film will then prevent contact between the TiO2 film and the MB solution.
Keywords:Ag/TiO2 composite film  mid-frequency AC magnetron sputtering  photocatalytic degradation  methylene blue
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