面向非硅MEMS的桌面微装配系统模块化设计方法

针对非硅MEMS零件的装配瓶颈难题,提出一种面向非硅MEMS的桌面微装配系统模块化设计方法.论述了所提出桌面微装配系统的内涵、特点及其应用对象,并在此基础上提出了基于装配单元通用功能完整性和系统可重配置性的模块划分原则;利用相关性分析方法建立了综合相关矩阵并应用模糊聚类方法对其进行了操作,确定了模块划分定量计算流程,利用模糊评价方法对模块划分合理性进行了评价;以桌面微装配系统的自主式装配单元为实例进行了设计方法的验证,证明了模块化设计方法的有效性. 

Modular Design Method of Desktop Micro-Assembly System for Non-Silicon MEMS

To solve the bottleneck problem of assembly of non-silicon MEMS, a modular design method of desktop micro-assembly system was proposed for non-silicon MEMS. First, the connotation, the characteristics and the application of desktop micro-assembly system were elaborated, and the principle of module partition was presented based on general function integrity of assembly unit and reconfiguration of system. Afterwards, the method of correlation analysis for the subassembly of micro-assembly system was put forward and the comprehensive correlation matrix was established through the method of correlation analysis, the correlation matrix was processed with a fuzzy clustering method, and the quantitative calculating process of module partition was ascertained. After that, the result of module partition was evaluated by fuzzy evaluation method. Finally, taking the autonomous assembly unit of desktop micro-assembly system as the sample, the validity of the modular design method was validated in the design process of a desktop micro-assembly system.