| 等离子体制备低表面能薄膜性能研究 |
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| 引用本文： | 付亚波,陈强,葛袁静.等离子体制备低表面能薄膜性能研究[J].北京理工大学学报,2005,25(Z1):254-258. |
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| 作者姓名： | 付亚波 陈强 葛袁静 |
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| 作者单位： | 北京印刷学院,等离子体物理与材料研究室,北京,102600 |
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| 摘 要： | 以六甲基二硅氧烷为反应单体,采用连续与脉冲射频(RF)等离子体两种放电模式聚合低表面能薄膜,研究了连续放电不同功率、脉冲放电不同脉冲宽度和间隔对聚合薄膜性能的影响.通过对薄膜性能的表征:接触角的测量,红外光谱、X光电子能谱和原子力显微镜的结构和表面分析,发现在低输入功率和脉冲等离子体大与空比条件下,可得到表面能低、疏水性能好、表面结构可控的低表面能薄膜.
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| 关 键 词： | 等离子体 等离子体聚合 结构性能 脉冲等离子体 体制 低表面能薄膜 薄膜性能 研究 Plasmas Continuous Film 结构可控 疏水性能 条件 输入功率 发现 表面分析 显微镜 原子力 光电子能谱 红外光谱 测量 接触角 |
| 文章编号： | 1001-0645(2005)增刊-254-05 |
| 修稿时间： | 2005年6月8日 |
The Characterizations of Low Surface Energy Film Polymerized in Continuous and Pulsed Plasmas |
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| FU Ya-bo,CHEN Qiang,GE Yuan-jing.The Characterizations of Low Surface Energy Film Polymerized in Continuous and Pulsed Plasmas[J].Journal of Beijing Institute of Technology(Natural Science Edition),2005,25(Z1):254-258. |
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| Authors: | FU Ya-bo CHEN Qiang GE Yuan-jing |
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| Abstract: | A kind of low surface energy polymer is deposited in continuous and pulsed radio frequency (13.56 MHz) plasma model with hexamethyl disiloxane (HMDSO) as a monomer. The surface characteristic of the film is examined by water contact angle, fourier transform infrared spectroscopy (FTIR), and atomic force microscopy(AFM) as well as X-ray photoelectron spectroscopy(XPS). It is found that with a small incident power and a large duty cycle in pulsed plasma, the structure-tailored polymer with super-low surface energy can be deposited easily. |
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| Keywords: | plasmas polymerization surface characteristic |
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