K波段CMOS反射负载型无源移相器

研究应用于K波段相控阵收发系统的差分反射负载型无源移相器的设计方法.基于TSMC 90 nm CMOS工艺实现了一个5 bit移相器，其反射负载由电感和变容二极管并联组成.测试结果表明，该移相器的移相误差在23~25 GHz频带内小于6°，在22~26 GHz频带内小于15°.又基于相同工艺提出了一个改进的6 bit移相器，采用品质因数相对较高的叉指电容阵列替代传统的变容二极管，通过开关控制实现电容值的改变.仿真结果表明，改进版移相器的移相误差在23~25 GHz频带内小于4°，在22~26 GHz频带内小于8°. 

K-Band CMOS Reflection-Type Passive Phase Shifter

A design method of differential reflection-type passive phase shifter was studied for K-band phased array transceiver system. A 5-bit phase shifter was fabricated in TSMC 90 nm CMOS technology. The reflective load was made up of an inductor and a varactor in parallel connection. Measurement results show that, the phase error is less than 6° from 23 to 25 GHz and less than 15° from 22 to 26 GHz. Based on the same process, an improved 6-bit phase shifter was proposed. A MOM (metal oxide metal) capacitor array with a relatively high quality factor was used to replace the traditional varactor of the reflective load. The capacitance value change was carried out by switch control. Simulation results show that the phase error of the new phase shifter is less than 4° from 23 to 25 GHz and less than 8° from 22 to 26 GHz.