MEMS微型热敏传感器数值模拟

借助计算流体动力学软件Fluent,采用有限体积法、非定常N-S方程、Realizablek-ε湍流模型及无滑移壁面边界条件对微电子机械系统(MEMS)微型热敏传感器进行三维数值模拟.全面地分析了传感器绝缘层材料、空腔内介质材料以及结构尺寸参数对其灵敏度的影响情况,探讨了提高传感器灵敏度的方法.同时,设计了一款高灵敏度的MEMS微型热敏传感器.数值模拟结果发现,采用具有较低热导率的结构材料及工作气体,隔热效果最佳;合理优化传感器尺寸参数有助于获得较高的灵敏度.该结果对微型热敏传感器的优化设计和实际加工、制造提供了依据.

Numerical Simulation of MEMS Micro Thermal Sensor

Based on the finite volume method,numerical simulation of three dimension MEMS micro thermal sensor is proposed using the computational hydrokinetics commercial software fluent.In the simulation,time-dependent N-S equation,realizable k-ε viscous model and no-slip wall boundary conditions were adopted.The influence of insulation layer material,gas working media and structure geometric dimension on the sensor sensitivity was studied and the measures to improve sensor sensitivity were investigated.Moreover the design of the micro thermal sensor with high sensitivity was finished.Simulation results show that the heat loss on the substrate is the smallest when the sensor is of good structure material and working media.The results also indicate that the optimized sensor geometric dimension is beneficial to the sensitivity.