极紫外和软X射线多层膜光学

综述了极紫外和软X射线多层膜光学及其应用，指出了极紫外和软X射线光学的优点和难点。在软X射线激光诊断高温高密度等离子体的干涉实验中，迫切需要既有一定反射率、又有一定透过率，同时具有很高面形精度的半反半透多层膜和高反射率多层膜组成的X射线激光干涉仪，以实现对高温等离子体临界面附近电子密度的诊断。在分析软X射线多层膜偏振特性基础上，设计了类镍银软X射线激光干涉仪用半反半透多层膜，并用离子束溅射方法制备了这样的元件，同步辐射反向率和透过率测试表明已制备的半反半透多层膜达到了进行软X射线干涉实验的要求。

Multilayer Optics in Extreme Ultraviolet and Soft X- ray Range

Multilayer optics in the extreme ultraviolet and soft X-ray range is reviewed in the paper.The advantages and difficulties are pointed out.In the interference experiments using soft X-ray laser for diagnosed high temperature and high dense plasmas,it is urgently necessary to have some semitransparent multilayer beam splitters with definite reflectivity and transmission as well as high quality surface figure.On the basis of the polarized properties of the multilayers,the semitransparent beam splitters were designed and fabricated using ion beam sputtering.The measured results by using reflectometer in Beijing Synchrotron Radiation Facility showed that the requirements of the splitters in the soft X-ray laser interference experiments were met.