| 聚合物阵列波导光栅波分复用器的研究 |
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| 引用本文： | 陈开鑫,赵禹,崔占臣,张大明,马春生,刘式墉,衣茂斌.聚合物阵列波导光栅波分复用器的研究[J].吉林大学学报(信息科学版),2002,20(1):8-12. |
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| 作者姓名： | 陈开鑫 赵禹 崔占臣 张大明 马春生 刘式墉 衣茂斌 |
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| 作者单位： | 1. 吉林大学,集成光电子学国家重点联合实验室,吉林,长春,130023
2. 吉林大学,化学学院,吉林,长春,130023 |
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| 基金项目： | 国家重点基础研究发展计划(973计划);G2000036604; |
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| 摘 要： | 利用甲基丙稀酸甲酯-甲基丙稀酸缩水甘油酯共聚物制作聚合物光波导，对聚合物阵列波导光栅波分复用器的原理、版图设计及制作工艺进行了研究。设计了聚合物阵列波导光栅的版图，并利用厚胶掩模和铝掩模两种工艺完成了聚合物阵列波导光栅光波导的制作。实验结果证明，与厚胶掩模相比，铝掩模具有较好工艺重复性，同时也更能实现设计所要求的参数。
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| 关 键 词： | 波分复用器 光波导 列阵波导光栅 聚合物 |
| 文章编号： | 1671-5896(2002)01-0008-05 |
Investigation of polymer arrayed waveguide grating multiplexer |
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| CHEN Kai xin ,ZHAO Yu ,CUI Zhan chen ,ZHANG Da ming ,MA Chun sheng ,LIU Shi yong ,YI Mao bin.Investigation of polymer arrayed waveguide grating multiplexer[J].Journal of Jilin University:Information Sci Ed,2002,20(1):8-12. |
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| Authors: | CHEN Kai xin ZHAO Yu CUI Zhan chen ZHANG Da ming MA Chun sheng LIU Shi yong YI Mao bin |
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| Institution: | CHEN Kai xin 1,ZHAO Yu 1,CUI Zhan chen 2,ZHANG Da ming 1,MA Chun sheng 1,LIU Shi yong 1,YI Mao bin 1 |
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| Abstract: | The theory, the design and the fabrication procedure of polymer arrayed waveguide grating (AWG) were investigated by the use of epoxypropyl methylacrylate co methyl methacrylate polymer and bisphenyl A epoxy mixture to fabricate polymer waveguide. The photolithography mask of AWG was designed. And the polymer waveguide of AWG was fabricated by utilizing both the thick photoresist and aluminum film to form the mask that was used in O 2 reactive ion etching. The results show that comparing with the thickness photoresist, the conditions of the fabrication of waveguide can be well repeated and the dimensions of the waveguide are more close to the design parameter, when aluminum film is used to form the mask. |
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| Keywords: | Wavelength division multiplexers(WDMS) Optical waveguides Arrayed waveguide grating Polymer |
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