基于加载条形光波导结构的聚合物热光开关

为解决有机/ 无机杂化材料薄膜厚度较薄且难加工等问题, 设计并制作了一种基于加载条形光波导结构 的 MZI(Mach-Zehnder Interferometer)型快速、 低功耗热光开关器件。 聚合物材料具有较低的热导率和较大的热 光系数, 能有效降低器件的功耗, 以热导率相对较大的 SiO 2 的衬底作为下包层, 可有效加快器件响应时间。 采用热光系数较大的有机/ 无机杂化材料 DR1/ SiO 2 -TiO 2 作为波导芯层, 以聚甲基丙烯酸甲酯和甲基丙烯酸环 氧丙酯的共聚物(P(MMA-GMA): Poly-Methyl-Methacrylate-Glycicly-Methacrylate)作为加载条波导, 以聚甲基丙 烯酸甲酯(PMMA: Polymethyl Methacrylate)作为波导上包层, 设计了热光开关器件。 采用 COMSOL 软件模拟了 器件的光场和热场分布, 采用微加工工艺并结合光漂白技术进行了开关器件的制备。 并在 1 550 nm 工作波长 下测试开关器件的性能。 可在缩短器件响应时间的同时降低器件的功耗, 驱动功率为 9. 2 mW, 消光比为 21. 2 dB, 开关的上升、 下降时间分别为 152. 8 滋s 和 180. 0 滋s。

Polymeric Thermo-Optic Switch Based on Strip-Loaded Optical Waveguide

To solve the problem of that the organic/inorganic material has a thinner film and is difficult to process,we design and fabricate a polymeric MZI (Mach-Zehnder Interferometer) TO (Thermo-Optic) switch based on strip-loaded waveguide structure.The polymer materials have the advantages of lower thermal conductivity and larger thermo-optical coefficient,and can reduce the power-consumption of the TO device effectively.The SiO2 is used as the under-cladding which can shorten the response time of the device.We selected the organic/inorganic hybrid material DR1/SiO2-TiO2 as the core layer,the P(MMA-GMA) (Poly-Methyl-Methacrylate-Glycicly-Methacrylate) as the loading strip,and poly methyl methacrylate (PMMA:PolymethylMethacrylate) as the upper-cladding.The light field and thermal field distribution of the TO switch are both simulated.The TO switch is fabricated by using the microfabrication process and photobleaching technology.At 1 550 nm wavelength,the power consumption is about 9.2 mW,and the extinction ratio of the device is 21.2 dB.The rise/fall times of the switch are 152.8 μs/180.0 μs,respectively.