缓冲区容量为2的单臂树形多组合设备的建模与调度

在半导体制造中,多组合设备被广泛应用于晶圆加工.对于缓冲区容量为2的单臂树形多组合设备,当机械手的移动时间远远小于晶圆加工时间时,它是否存在一个1-晶圆最优周期调度仍是个有待解决的问题.针对此问题,本文首先运用Petri网对系统进行建模,经过对单组合设备调度和相邻设备协调运作的分析,证明系统的1-晶圆周期达到下界值时总是可调度的,并给出相应的调度算法.最后通过实例验证了算法的有效性以及实用性.

Modeling and scheduling of single-arm tree-like multi-cluster tools with two-space buffering modules

Multi-cluster tools have been widely adopted in wafer fabrication in semiconductor manufacturing. For single arm tree-like multi-cluster tools with two-space buffering modules, when the moving time of robots is much less than wafer processing time, whether there is one-wafer optimal cyclic scheduling is still a problem remaining to be solved. Aiming at this problem, a Petri net model has been built up to analysis the tool system. Based on the Petri net model, conditions are presented under which a one-wafer cyclic schedule with the lower bound of cycle time can be found and an algorithm is developed to coordinate the activities of adjacent arms. Finally, an illustrative example is given to show the effectiveness and application of the algorithm.