| 用分子束外延技术按样定制半导体微观结构 |
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| 引用本文： | Ploog,K 张治国.用分子束外延技术按样定制半导体微观结构[J].大自然探索,1998,17(1):66-70. |
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| 作者姓名： | Ploog K 张治国 |
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| 作者单位： | 保罗—德鲁迪固体电子学研究所 |
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| 摘 要： | 在按样定制的半导体微观结构中，通过把异质结精确地植入晶体内即可定域地确定所期望的势能差。分子束外延技术用于以一个原子接一个原子的构建晶体薄膜，从而可以在微观惊工内精确地“裁剪”人工层状晶体。在ＧａＡｓ／ＡｌｘＧａ１－ｘＡｓ超晶格中各组分的周期性调制产生了新颖的电子性质，它开辟了崭新的技术用途。
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| 关 键 词： | 半导体微观结构 分子束外延 超晶格 定制 |
FABRICATION OF CUSTOM-DESIGNED SEMICONDUCTOR MICROSTRUCTURES BY MOLECULAR BEAM EPITAXY |
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| Klaus Ploog.FABRICATION OF CUSTOM-DESIGNED SEMICONDUCTOR MICROSTRUCTURES BY MOLECULAR BEAM EPITAXY[J].Discovery of Nature,1998,17(1):66-70. |
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| Authors: | Klaus Ploog |
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| Abstract: | In custom-designed semiconductor microstructures the desired potential differences are defined locally by the accurate positioning of heterojunctions into the crystal.The technique of molecular beam epitaxy is used to bulid up crystalline thin films atom-by-atom so that artificially layered crystals are accurately tailored within microscopic dimensions.The periodic modulation of the composition in GaAs/Al xGa 1-x As Superlattices gives rise to novel electronic properties which open up new technical applications. |
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| Keywords: | semiconductor microstructures molecular beam epitaxy superlattices |
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