| 磁控溅射法制备氧化铜纳米线阵列薄膜及其气敏性质 |
| |
| 引用本文： | 乔振聪,程轲,袁占强,武兴会,庞山,王广君,万绍明,杜祖亮.磁控溅射法制备氧化铜纳米线阵列薄膜及其气敏性质[J].科学通报,2011(Z2). |
| |
| 作者姓名： | 乔振聪 程轲 袁占强 武兴会 庞山 王广君 万绍明 杜祖亮 |
| |
| 作者单位： | 河南大学特种功能材料教育部重点实验室; |
| |
| 基金项目： | 国家自然科学基金(10874040,20773103); 教育部科技创新工程重大项目培育基金(708062); 河南省创新人才基金资助项目 |
| |
| 摘 要： | 通过磁控溅射法在掺氟二氧化锡导电玻璃(FTO)衬底上溅射金属铜薄膜,所制备的Cu薄膜在管式炉中退火氧化生长得到CuO纳米线阵列薄膜.用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、高分辨透射电子显微镜(HRTEM)对其形貌和结构进行了表征,并研究了这种通过磁控溅射得到的CuO纳米线阵列薄膜对CO和H2S的气敏性质.研究结果表明,CuO纳米线阵列薄膜在250℃时对CO气体具有最强的气敏响应,并且当CO浓度增大时其气敏响应明显增强.而对于H2S气体,在常温下CuO纳米线阵列薄膜能够对低浓度的H2S气体响应,说明这种CuO纳米线阵列薄膜可以在常温、低浓度下探测H2S气体;而当测试温度升高时,其电阻值在H2S气体氛围中迅速减小.我们对这种异常的电阻变化现象进行了解释.
|
| 关 键 词： | 磁控溅射 CuO纳米线 阵列薄膜 气敏性质 |
Synthesis and gas-sensing properties of CuO nanowires array film by magnetron sputtering method |
| |
| QIAO ZhenCong,CHENG Ke,YUAN ZhanQiang,WU XingHui,PANG Shan,WANG GuangJun,WAN ShaoMing & DU ZuLiang Key Laboratory for Special Functional Materials of Ministry of Education,Henan University,Kaifeng ,China.Synthesis and gas-sensing properties of CuO nanowires array film by magnetron sputtering method[J].Chinese Science Bulletin,2011(Z2). |
| |
| Authors: | QIAO ZhenCong CHENG Ke YUAN ZhanQiang WU XingHui PANG Shan WANG GuangJun WAN ShaoMing & DU ZuLiang Key Laboratory for Special Functional Materials of Ministry of Education Henan University Kaifeng China |
| |
| Institution: | QIAO ZhenCong,CHENG Ke,YUAN ZhanQiang,WU XingHui,PANG Shan,WANG GuangJun,WAN ShaoMing & DU ZuLiang Key Laboratory for Special Functional Materials of Ministry of Education,Henan University,Kaifeng 475004,China |
| |
| Abstract: | The thin copper films were deposited by magnet sputtering on fluorine-doped tin oxide(FTO) coated glass.The CuO nanowires array film can be obtained through the heat oxidation process.The morphology and microstructure of the copper film and the CuO nanowires film was characterized by X-ray diffraction(XRD),scanning electron microscopy(SEM) and high-resolution transmission electron microscopy(HRTEM),respectively.The CO and H2S sensing characteristics of the CuO nanowires array film were also investigated.The... |
| |
| Keywords: | magnetron sputtering CuO nanowires array film gas-sensing properties |
| 本文献已被 CNKI 等数据库收录！ |
|
