| 显微干涉系统测量微细图形的台阶高度 |
| |
| 引用本文： | 薛实福,李庆祥,王伯雄,徐毓娴,于水. 显微干涉系统测量微细图形的台阶高度[J]. 清华大学学报(自然科学版), 1990, 0(5) |
| |
| 作者姓名： | 薛实福 李庆祥 王伯雄 徐毓娴 于水 |
| |
| 作者单位： | 精密仪器与机械学系(薛实福，李庆祥，王伯雄，徐毓娴)，精密仪器与机械学系(于水) |
| |
| 摘 要： | 介绍了显微干涉系统测量微细图形台阶高度的方法。从理论和设计角度分析了干涉条纹形状、间隔、对比度及稳定性，对该系统进行了实验，实验结果表明，对比度Ｋ＞０．８，测量精度优于８ｎｍ。
|
| 关 键 词： | 显微镜 干涉测量 台阶高度 |
Step-height Measurement Using Microscopic Interferometry |
| |
| Xue Shifu,Li Qingxiang,Wang Boxiong,Xu Yuxian,Yu Shui. Step-height Measurement Using Microscopic Interferometry[J]. Journal of Tsinghua University(Science and Technology), 1990, 0(5) |
| |
| Authors: | Xue Shifu Li Qingxiang Wang Boxiong Xu Yuxian Yu Shui |
| |
| Affiliation: | Department of Precision Instruments and Mechanology |
| |
| Abstract: | This paper describes a method for measuring stepheight by means of microscopic interferometry. An analysis for interference fringe form, interval, contrast and stability was made both theoretically and experimentally. Experiments were made with this system. The results show that the contrast K is larger than 0.8 and the measurement accuracy is improved (less than 5nm). |
| |
| Keywords: | Microscopic interferometry step-height. |
| 本文献已被 CNKI 等数据库收录！ |
