微齿轮齿面磨损行为及仿真分析

微型齿轮作为微机电系统(MEMS)的关键零部件，齿面磨损是影响其服役性能及失效形式的主要因素之一。为了研究微齿轮齿面磨损机理，基于Archard磨损理论，利用ABAQUS二次开发UMESHMOTION子程序，结合ALE自适应网格技术，建立了微齿轮齿面磨损有限元分析模型，得到了不同啮合周期下的齿面磨损分布规律，并进行了试验验证。基于构建的有限元模型，考虑主、从齿面磨损的相互作用，分析了不同材料性能(弹性模量)及材料配对方式对齿面磨损分布及大小的影响。研究结果表明，微齿轮齿面磨损最严重的地方发生在靠近齿根的基圆附近，齿顶附近磨损较轻；与材料性能相比，不同材料配对对微齿轮磨损大小影响更显著。

Wear behavior and simulation analysis of micro gear tooth surface

Micro gear is the key element of micro-electro-mechanical system(MEMS). The tooth surface wear is one of the main factors affecting its service performance and failure mode. In order to study the wear mechanisms of micro gear, the UMESHMOTION subroutine in ABAQUS is developed based on the Archard wear theory, and a finite element analysis model of the wear in micro gear is established combining with ALE adaptive mesh technology. Then, the tooth surface wear distribution under different meshing periods is obtained and verified. Based on the constructed finite element model, considering the interaction of the master and slave tooth surface wear, the influence of different material properties (modulus of elasticity) and material pairing on the tooth surface wear distribution are analyzed. The results show that the most serious wear of the micro gear tooth surface occurs at the base circle near the tooth root, and the wear near the tooth tip is lighter; compared with the material properties, different material pairing has a more significant effect on the wear of the micro gear.