单级悬浮工作台平面运动测量系统对准误差分析

为了得到单级6自由度悬浮工作台的运动学模型,将非接触驱动和支承等效为由万向联轴器、伸缩杆和平面运动副组成的支链,在移动台转角很小的情况下,平面运动与离面运动相互独立,且不受伸缩杆与基座表面垂直度误差的影响.基于欧拉转动定理,通过计算工作台在2个不同位置时光轴与反射镜镜面交点之间的距离,建立了工作台平面运动测量系统三维对准误差模型.测量误差的分布及其对误差源的灵敏度表明,二维对准误差分析方法忽略的离面对准误差的灵敏度最大可达平面对准误差灵敏度的25%,L形反射镜绕z轴偏转造成的对准误差及镜面垂直度误差是影响测量误差的主要因素.

Measurement Alignment Error Analysis for In-Plane Motion of a Precision Levitation Stage

A kinematic model of a 6-DOF precision levitation stage is developed by equivalent chains consisting of universal joints,extensible legs and planar joints instead of non-contact actuators and bearings.The moving platform in-plane motion is independent of its out-of-plane motion while rotation displacements are small,and this kinematic characteristic does not change if extensible legs are not perpendicular with the base surface,so the accuracy of this stage mainly depends on the measurement system accuracy.B...