| 一种新型双稳态微机电系统电磁微继电器的研制 |
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| 引用本文： | 付世,丁桂甫,王艳.一种新型双稳态微机电系统电磁微继电器的研制[J].上海交通大学学报,2006,40(11):1947-1950,1954. |
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| 作者姓名： | 付世 丁桂甫 王艳 |
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| 作者单位： | 上海交通大学,微米/纳米加工技术国家重点实验室,薄膜与微细技术教育部重点实验室,上海,200030 |
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| 基金项目： | 上海市科技发展基金;国家自然科学基金 |
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| 摘 要： | 介绍了一种基于微机电系统(MEMS)技术的新型双稳态电磁微继电器的设计及其制作工艺,并对其主要性能进行了测试.利用换向脉冲电流驱动高效的“三明治”式电磁驱动结构,带动电接触刷的运动来控制外电路的通断;辅助设计的永磁稳定结构使器件在脉冲间歇能够保持稳定状态而无需额外功耗.测试结果表明,这种新型电磁微继电器具有体积小,功耗低,响应速度快,接触电阻小等优点.
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| 关 键 词： | 微机电系统 电磁微继电器 双稳态 |
| 文章编号： | 1006-2467（2006）11-1947-04 |
| 收稿时间： | 2005-11-21 |
| 修稿时间： | 2005-11-21 |
Development of a Novel Bi-stable MEMS Electromagnetic Microrelay |
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| FU Shi,DING Gui-fu,WANG Yan.Development of a Novel Bi-stable MEMS Electromagnetic Microrelay[J].Journal of Shanghai Jiaotong University,2006,40(11):1947-1950,1954. |
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| Authors: | FU Shi DING Gui-fu WANG Yan |
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| Institution: | National Key Lab. of Nano/Micro Fabrication Technology, Key Microfabrication of Ministry of Education, Shanghai Jiaotong Univ. , Lab. for Thin Film Shanghai 200030, and China |
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| Abstract: | The design,fabrication and main performance of a novel bi-stable MEMS electromagnetic microrelay were introduced.Bi-directional pulse currents actuate the highly efficient "sandwich" driver mechanism and make the electronic brush move to control the on/off state of the outer circuit.Microrelay can keep stable states without other power contributed to the aided design,permanent magnetic structure,at the interval between the adjacent pulses.The measurement results indicate that the novel microrelay fabricated by MEMS technology has the following merits such as small volume,high response speed,low power consumption and resistance and so on. |
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| Keywords: | micro-electro-mechanical systems(MEMS) electromagnetic microrelay bi-stable |
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