Active Vibration Isolation System for Sub-microultra-precision Turning Machine

Now vibration isolation of ultra-precision machine tool is usually achieved through air-springs systems. As far as HCM-I sub-micro turning machine developed by HIT, an active vibration isolation system that consists of air-springs and electro-magnetic actuators was presented. The primary function of air-springs is to support the turning machine and to isolate the high-frequency vibration. The electro-magnetic actuators controlled by fuzzy-neural networks isolate the low-frequency vibration. The experiment indicates that active vibration isolation system isolates base-vibration effectively in all the frequency range. So the vibration of the machine bed is controlled under 10-6g and the surface roughness is improved.