| 改善AMR薄膜磁电阻传感器线性度的几种方法 |
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| 引用本文： | 王立锦.改善AMR薄膜磁电阻传感器线性度的几种方法[J].北京科技大学学报,2006,28(8):744-749. |
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| 作者姓名： | 王立锦 |
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| 作者单位： | 北京科技大学材料科学与工程学院,北京,100083 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | 在分析金属薄膜磁电阻传感器非线性产生原因的基础上,提出了几种设计AMR(各向异性磁电阻)薄膜磁电阻传感器时改善其线性度的方法.用直流磁控溅射方法制备了Ni80Fe20和Ni65Co35 AMR薄膜材料;用微加工工艺制做出了几种AMR传感器元件,并给出了测试结果.
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| 关 键 词： | 金属薄膜 各向异性磁电阻效应 传感器 线性度 微加工 改善 薄膜材料 电阻传感器 线性度 方法 sensors linearity improve 测试结果 元件 工艺制做 微加工 法制 直流磁控溅射 各向异性磁电阻 设计 非线性 金属薄膜 分析 |
| 收稿时间： | 2005-05-30 |
| 修稿时间： | 2005-09-15 |
Several methods to improve the linearity of AMR sensors |
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| WANG Lijin.Several methods to improve the linearity of AMR sensors[J].Journal of University of Science and Technology Beijing,2006,28(8):744-749. |
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| Authors: | WANG Lijin |
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| Institution: | Materials Science and Engineering School, University of Science and Technology Beijing, Beijing 100083, China |
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| Abstract: | Several methods to improve the linearity of anisotropic magnetoresistance (AMR) sensors were suggested based on the analysis of the generation of nonlinearity in magnetoresistive sensors of metallic films. Ni_ 80 Fe_ 20 and Ni_ 65 Co_ 35 AMR thin films were prepared by DC magnetic sputtering. Some AMR sensors were made by the micro-fabrication technique,and the testing results were also presented. |
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| Keywords: | metallic films anisotropic magnetoresistance effects sensor linearity microfabrication |
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