改进Turner法制备光纤探针

采用改进的Turner法制备近场光学显微镜光纤探针,考察了外界因素、腐蚀溶液及保护液体系性质等对探针形貌的影响,并与管式腐蚀方法制备的光纤探针的形貌进行了对比,对Turner法制备光纤探针的工艺进行了改进.结果表明:升高反应温度可明显提高反应速度,温度由0℃升至32℃时,反应速度增加1.6倍;腐蚀溶液浓度越高,制备的探针锥长越短、表面越粗糙;适当延长反应时间可增大探针的锥角;Turner法制备光纤探针时探针锥面蜂窝状粗糙形貌是光纤探针成尖过程的本质缺陷造成的;采用第二次修饰性腐蚀可以有效地改进探针的粗糙锥面,并增大探针的圆锥角.

Fabrication of Fiber Probes Using Improved Turner Method

Fiber probes for near-field scanning optical microscope were fabricated using the improved Turner me-thod. Then, the morphology of the probes affected by such parameters as the environment factor and the characte-ristics of the etchant and the cover layer was investigated and compared with that of the probes fabricated via the tube etching. Moreover, the process of the Turner method was modified. The results indicate that (1) the reaction speed greatly increases with the reaction temperature, and an temperature increase from 0℃ to 32℃ may accelerate the reaction by 1.6 times;(2) with the increase of etching solution concentration, the taper length becomes shorter and the surface becomes rougher;(3) a suitable long reaction time may increase the taper angle of the probes;(4) the rough honeycomb taper surface of the probes is due to the inherent limitation of the taper-forming process;and (5) a second etching effectively smoothes the taper surface and enlarges the taper angle.