透射电镜真空系统的自动应急处理方法及其实现

透射电镜的某些故障可能会影响真空系统的正常运行,甚至导致某些真空部件的损坏。基于实际应用需求研究了真空系统的自动应急处理方法。通过分析透射电镜及其真空系统的故障种类和模式,将故障按其危害严重程度进行分级。针对不同等级的故障采取不同的应对措施,并确定应急操作方法,以及故障处理完毕后重新启动真空系统的流程。采用自动触发方法实现真空控制系统的自动报警、自动应急处理响应,以确保透射电镜正常运行。通过实际应用表明,真空控制系统的自动应急处理措施是有效的,基于自动触发的故障处理方法能够满足系统对故障的应急处理要求。

Method of Emergency Auto-disposition of Vacuum System in Transmission Electron Microscope and Its Implementation

Some failures occurring in transmission electron microscope (TEM) maybe affect the normal operation of vacuum system, even destroy the vacuum components. Based on the practical application requirement, consequently, the method of emergency auto-disposition of vacuum system is researched. By analyzing the failure variety and modes of the TEM vacuum system, the failure is classified according to the degree of damage. Furthermore, aiming to the failure of different degree, the relevant disposal is adopted, the emergency operation plan is confirmed, and the startup flow of vacuum system is marked out after fault handling finished. By auto-triggered mode the automatic alarm and response of vacuum control system are achieved so as to ensure the normal operation of TEM. By the actual operation, the results show that the emergency auto-disposition of vacuum control system is effective, and the failure processing method based on auto-triggered method satisfies the system requirements for the emergency disposition of failure.