| 离子束作用下动态靶的计算机模拟 |
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| 引用本文： | 崔福斋,李恒德,李文治,郑里平.离子束作用下动态靶的计算机模拟[J].清华大学学报(自然科学版),1988(3). |
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| 作者姓名： | 崔福斋 李恒德 李文治 郑里平 |
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| 作者单位： | 清华大学工程物理系
(崔福斋，李恒德，李文治)，中国科学院上海原子核研究所(郑里平) |
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| 摘 要： | 固体中离子传输和原子碰撞级联的计算机模拟程序ＴＣＩＳ已发展起具有模拟离子 束作用下固体靶中成分动态演变的功能。本文详细介绍动态 ＴＣＩＳ模拟程序的物理模 型及计算方法，给出算例及有关问题的讨论。动态 ＴＣＩＳ可以研究离子束轰击三元靶 的复杂问题：如大剂量离子注入、择优溅射和界面混合等。
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| 关 键 词： | 原子碰撞级联 Monte-Carlo法 计算机模拟 离子注入 溅射 界面 |
Computer Simulation of Dynamic Target Bombarded by Ion Beam |
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| Cui Fuzhai, Li Hengde, Li Wengzhi.Computer Simulation of Dynamic Target Bombarded by Ion Beam[J].Journal of Tsinghua University(Science and Technology),1988(3). |
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| Authors: | Cui Fuzhai Li Hengde Li Wengzhi |
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| Abstract: | TCIS code simulating ion transport and atomic collision cascade has been developed, which can simulate the evolution of target compositions during ion bombardment. In this paper, the physical model and calculation procedure of this code are introduced. Examples and discussion are also given. Dynamic TCIS code may investigate complex problems concerning three-elemental targets bombarded by energetic ions, such as the ion implantation at large dose, preferential sputtering, ion mixing, etc. |
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| Keywords: | atomic collision cascade Monte-Carlo method computer simulation ion implantation sputtering interface |
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