图纹结构Co／Pt多层膜的制备及研究

先采用自组装技术制备大面积有序聚苯乙烯微球模板，在此基础上，制备Co／Pt多层膜纳米碗和纳米点列阵样品．利用扫描电子显微镜（SEM）、原子力显微镜（AFM）和透射电子显微镜（TEM）对制备样品的表面形貌进行了分析．结果表明：溅射方法和刻蚀处理对纳米碗和纳米点的形貌存在影响，磁滞回线的结果表明倾斜溅射条件下制备的纳米点阵具有明显的方向取向性．

Preparation and Research on Co/Pt Multi-layer Film with Graphic Structure

The paper analyses the surface morphology of nano bowl arrays and nano dot arrays on the multi-layer Co/Pt membrane that was previously prepared on a large template of polystyrene microspheres by self-assembly technology. The purpose of the analysis is to study the influences that different conditions and etching process have on the morphology of the arrays of nano bowls and dots.. And the result shows：sputtering and etching can affect the morphology of nano bowl arrays and nano dot arrays. And the nano bowl arrays prepared by sputtering face toward a clear direction.