| 多轴激光位移测量同步采样技术 |
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| 引用本文： | 潘海鸿,李小清,周云飞.多轴激光位移测量同步采样技术[J].华中科技大学学报(自然科学版),2007,35(3):89-92. |
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| 作者姓名： | 潘海鸿 李小清 周云飞 |
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| 作者单位： | 1. 华中科技大学,机械科学与工程学院,湖北,武汉,430074;广西大学,机械工程学院,广西,南宁,530004
2. 华中科技大学,机械科学与工程学院,湖北,武汉,430074 |
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| 摘 要： | 采用基于广播总线的同步采样技术,提出6轴高精密XY工件台激光位移测量的同步测量架构.设计专门的同步动作控制器和同步信号总线,实现6轴激光位移测量系统的同步采样,提高了数据采样频率.结果表明:6个激光测量轴之间的同步采样时间误差最大为1.616ns,并由此引起的位移测量误差是0.808nm;在硬件读取数据方式下,6个激光测量轴最高采样频率可达640kHz.
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| 关 键 词： | 激光位移测量 纳米级精度 同步采样 多轴 激光位移测量 同步采样技术 displacement measurement laser sampling 硬件 位移测量误差 时间误差 测量轴 结果 采样频率 数据 位移测量系统 信号总线 控制器 同步动作 专门 设计 架构 |
| 文章编号： | 1671-4512(2007)03-0089-04 |
| 修稿时间： | 12 30 2005 12:00AM |
Synchronous sampling for multi-axis laser displacement measurement |
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| Pan Haihong,Li Xiaoqing,Zhou Yunfei.Synchronous sampling for multi-axis laser displacement measurement[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,2007,35(3):89-92. |
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| Authors: | Pan Haihong Li Xiaoqing Zhou Yunfei |
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| Institution: | 1.College of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China;2.College of Mechanical Engineering, Guangxi University, Nanning 530004, China |
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| Abstract: | Synchronous sampling architecture of 6-axis high-precision laser displacement measurement system for XY stage was proposed which based on synchronous sample broadcast bus.In order to realize synchronous sample and increase the sample frequencies,the synchronization action controller(SAC) based on field programmable gate array(FPGA) and the dedicated synchronization signal bus(SSB) were specially designed.The results show that the maximum value of sample delay uncertainty between six measurement channels is 1.616 ns,and the displacement measurement errors caused by the difference time of synchronous sample between two channels in the same measurement direction are less than 0.808 nm.The maximum sample frequency of all 6-axis laser measuring channels reaches approximately 640 kHz by SSB. |
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| Keywords: | laser displacement measurement nano-scale precision synchronous sampling |
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