一种提高并行共焦显微测量重复性精度的方法

并行共焦测量是利用微透镜和小孔列阵产生一个二维点光源阵列,实现对物面上一个二维阵列物点的同步共焦测量。传统的共焦显微测量系统对三维形貌进行重构,是通过搜索各个轴向扫描图像中光斑光强极值点的位置来获取三维轮廓,轴向扫描间距的选取对测量精度和重复性的影响很大。文章介绍了一种新的数据处理方法,其先对各物点的轴向光强采样值进行线性拟合,再由拟合得到的直线确定最大光强所对应的轴截面位置,这样可以在较大的轴向采样间距下获得较高精度的三维轮廓信息。实验结果表明,采用这种数据处理方法,测量精度和重复性精度均有所提高。

Method for enhancing micro-measurement repeatability precision of parallel confocal microscopy

The parallel confocal measurement is a kind of synchronous confocal measurement in which the 2-D light source array produced by the micro-optic component is used to realize the 2-D array plane measurement. The traditional 3-D profile is obtained by searching the position of the maximal facula optic-intensity in all the planes, so the size of axial distance influences measurement precision and repeatability greatly. In this paper, a new method for data processing is presented based on amelioration of the traditional arithmetic,and the higher accuracy of measurement can be achieved in the larger axial distance. In the data processing ,the linear fitting method is adopted to process a series of discrete points. The experimental results indicate that the axial measurement precision and repeatability precision are improved markedly by applying the presented method.