| 薄膜微结构分析的几种X射线散射技术 |
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| 引用本文： | 吴小山. 薄膜微结构分析的几种X射线散射技术[J]. 南通大学学报(自然科学版), 2008, 7(3) |
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| 作者姓名： | 吴小山 |
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| 作者单位： | 南京大学,固体微结构物理国家重点实验室,江苏,南京,210093 |
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| 摘 要： | 文章厄要介绍了X射线小角反射、X射线漫散射技术、X射线表面衍射和多晶薄膜的小角衍射实验原理和实验技术．特别针对各种实验技术中实验数据的采集要求做了细致描述；通过对自旋阀、异质结构中的应变、薄膜深度轮廓及应变规律等的研究，说明这些散射技术在薄膜研究中的应用．
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| 关 键 词： | 薄膜 微结构 X射线 散射 |
X-Ray Scattering Technologies of Microstructure Analysis of Thin Films |
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| WU Xiao-shan. X-Ray Scattering Technologies of Microstructure Analysis of Thin Films[J]. Journal of Nantong University (Natural Science Edition), 2008, 7(3) |
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| Authors: | WU Xiao-shan |
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| Affiliation: | National Key Laboratory of Solid State Microstructures;Nanjing University;Nanjing 210093;China |
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| Abstract: | Principles and technologies of small angle reflection,diffuse scattering and diffraction of X-rays,and small angle diffraction of polycrystal thin films are introduced.The requirements for data collection in various experimental technologies are specifically described.A few studies on spin valve,strain of isomerism,and depth contour of thin films,illustrate the applications of the scattering technologies in research of thin films. |
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| Keywords: | thin films microstructure X-ray scattering |
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