| 运用Sawyer Tower电路测试薄膜铁电性能 |
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| 引用本文： | 张涛,马宏伟,李敏,张鹏利,赵省贵.运用Sawyer Tower电路测试薄膜铁电性能[J].西安科技大学学报,2012,32(1):124-126. |
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| 作者姓名： | 张涛 马宏伟 李敏 张鹏利 赵省贵 |
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| 作者单位： | 1. 西安科技大学理学院,陕西西安,710054
2. 西安科技大学机械工程学院,陕西西安,710054 |
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| 基金项目： | 陕西省自然科学基金项目，教育部博士点基金项目，陕西省教育厅产业化项目，西安市科技局工业应用技术研发项目 |
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| 摘 要： | 声表面波煤矿瓦斯传感器是一种新型瓦斯传感器,PZT基高压电铁电薄膜是该类传感器制备的理想功能材料,铁电性作为PZT基铁电薄膜的另一个重要性能对传感器的工作特点和稳定性具有重要影响。因而,测试并掌握具有高压电性铁电薄膜的铁电性也是器件材料表征的一项重要工作。采用Sawyer Tower电路原理,自主设计铁电测试电路,制备PZT基铁电薄膜,并利用该电路测试薄膜的铁电性。由实验结果可知,自主设计的Sawyer Tower电路能简便、有效、准确和直观的测试薄膜的铁电性能,有望广泛应用于薄膜铁电性能测试及研究。
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| 关 键 词： | PZT 铁电薄膜 Sawyer Tower电路 铁电性能 |
Characterization of ferroelectricity of thin films by sawyer tower circuit |
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| ZHANG Tao
,
MA Hong-wei
,
LI Min
,
ZHANG Peng-li
,
ZHAO Sheng-gui.Characterization of ferroelectricity of thin films by sawyer tower circuit[J].JOurnal of XI’an University of Science and Technology,2012,32(1):124-126. |
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| Authors: | ZHANG Tao MA Hong-wei LI Min ZHANG Peng-li ZHAO Sheng-gui |
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| Institution: | 1(1.College of Sciences,Xi’an University of Science and Technology,Xi’an 710054,China;2.College of Mechanical Engineering,Xi’an University of Science and Technology,Xi’an 710054,China) |
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| Abstract: | The surface acoustic wave(SAW) sensors of methane are novel devices,and the PZT-based ferroelectric thin films with excellent piezoelectricity is important for SAW sensors.The ferroelectricity is an important behavior for the piezoelectric thin films for sensors,and so it’s necessary to characterize the ferroelectricity.In this paper,the PZT-based thin films are deposited by sputtering method,and the design with Sawyer Tower circuit is given,and the measurement system is established for the characterizations.The results show that the Sawyer Tower circuit is accurate to measure the ferroelectricity,which is expected to be applied in extensive application. |
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| Keywords: | PZT ferroelectric thin film Sawyer Tower circuit ferroclectric properties |
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