| 二极管电容检测用于微加速度计的误差分析 |
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| 引用本文： | 胡淏,董景新,万蔡辛,刘云峰.二极管电容检测用于微加速度计的误差分析[J].清华大学学报(自然科学版),2008,48(11). |
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| 作者姓名： | 胡淏 董景新 万蔡辛 刘云峰 |
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| 作者单位： | 清华大学,精密仪器与机械学系,北京,100084 |
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| 基金项目： | 国家预研项目
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| 摘 要： | 方波激励下的环形二极管电容检测电路应用于微机械加速度计是一种新的尝试.根据实践,该方案可以很好地在闭环系统中工作.该文建立了这种解调电路的数学模型,进行了误差分析,给出了其参数对闭环系统的影响.该方案在将检测电容变化转换为电压变化的过程中会引入非线性因素,该文证明了这种影响在闭环后可以忽略.计算结果表明,较解调电容的变化,敏感结构电容的变化将对输出电压的变化起主要的影响作用.此外,推导出的静电力公式说明,较大的激励电压会减小系统的稳定裕量.
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| 关 键 词： | 微机械加速度计 环形二极管 电容检测 误差分析 |
Error analysis of capacitance detector diodes in micro machined accelerometers |
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| HU Hao,DONG Jingxin,WAN Caixin,LIU Yunfeng.Error analysis of capacitance detector diodes in micro machined accelerometers[J].Journal of Tsinghua University(Science and Technology),2008,48(11). |
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| Authors: | HU Hao DONG Jingxin WAN Caixin LIU Yunfeng |
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| Institution: | HU Hao,DONG Jingxin,WAN Caixin,LIU Yunfeng(Department of Precision Instruments , Mechanology,Tsinghua University,Beijing 100084,China) |
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| Abstract: | Square wave actuated detector diodes play important roles in micro machined accelerometer systems.A model for this kind of differential capacitance detection circuit was used to analyze the system errors and the effect of the system parameters on the closed-loop system.The results show that the nonlinearities in the detector diodes can be neglected when the system works as a close-loop system and that the output is mainly determined by the variations of the sensor capacity,not the detector diode circuit cap... |
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| Keywords: | micro machined accelerometer detector diode capacitance detection error analysis |
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