掺铬类石墨薄膜摩擦学性能研究

采用非平衡磁控溅射离子镀技术,以电流控制方式在高速钢和硅基底上制备了不同C r含量的C/C r类石墨薄膜,测量了类石墨膜的显微硬度、膜基结合强度、摩擦系数和比磨损率,分析了薄膜的相结构,观察了薄膜的表面和断面形貌。结果表明:所制备的类石墨薄膜随C r含量的增高,硬度逐渐降低,结合强度先增后降,摩擦系数和比磨损率则先降后升;类石墨膜是含有多种纳米晶的非晶结构;金属元素C r含量影响了类石墨碳膜的表面形貌和组织结构。当C r含量在0.5%~2.5%时,薄膜表面光滑而结构致密,摩擦系数小且比磨损率低,膜基结合强度高,具有良好减摩耐磨性能。

Study on the Tribological Properties of Graphite-like Carbon Coatings Doped with Chromium

Graphite-like carbon(GLC) coatings doped with different chromium contents were prepared by four-targets unbalanced magnetron sputter ion plating technique on substrate of single crystal silicon and High Speed Steel(HSS) by means of altering sputtering current on chromium targets.The micro-hardness,bonding strength,friction coefficient and specific wear-rate of the coatings were measured,and the microstructures of the coatings were analyzed through X-Ray Diffraction(XRD) and Scanning Electron Microscopy(SEM).The results indicates that the micro-hardness decreased monotonously;bonding strength first increased and then decreased;friction coefficient and the specific wear-rate decreased first and then increased with the accretion of chromium contents;XRD analyses revealed GLC thin film is non-crystal structure,which consists of multi nano-crystal;content of metal element Cr led to changes of surface and cross-section morphologies and microstructure of the coatings.While the contents of chromium set to be form 0.5% to 2.5%,smooth and compact GLC were deposited with low friction coefficient,very small specific wear-rate,the bonding strength of the coatings as well,and shew well friction-reducing and antiwear abilities.