| 各向异性随机表面光散射轮廓实验研究 |
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| 引用本文： | 张俊超,孔德见,程传福.各向异性随机表面光散射轮廓实验研究[J].山东师范大学学报(自然科学版),2009,24(1):61-64. |
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| 作者姓名： | 张俊超 孔德见 程传福 |
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| 作者单位： | 山东师范大学物理与电子科学学院,250014,济南 |
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| 摘 要： | 用原子力显微镜对Si（100）晶片样品进行了表面形貌测量，发现了其高度分布的各向异性，通过推导和计算得出了一维正弦位相光栅散射各级极大的位置分布曲线，并将此曲线应用到样品表面光散射轮廓的测量中，对测量结果进行了定性分析，发现了散射轮廓主极大和次级大随入射角的变化关系，表面参量的提取有待于各向异性表面相关理论的进一步研究．
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| 关 键 词： | 各向异性表面 光散射轮廓 实验 |
STUDIES OF THE EXPERIMENT ON THE SCATTERING PROFILES OF ANISOTROPY RANDOM SURFACE |
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| Zhang Junchao,Kong Dejian,Cheng Chuanfu.STUDIES OF THE EXPERIMENT ON THE SCATTERING PROFILES OF ANISOTROPY RANDOM SURFACE[J].Journal of Shandong Normal University(Natural Science),2009,24(1):61-64. |
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| Authors: | Zhang Junchao Kong Dejian Cheng Chuanfu |
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| Institution: | ( College of Physics and Electronics, Shandong Normal University, 250014, Jinan , China ) |
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| Abstract: | The morphology of Si（100） wafer is studied with atomic force microscope and it is found that the sample is anisotropy random surface. The distribution of every diffraction maximum is presented by studying on the diffraction of 1 - D grating. And it was applied into the measurement on the scattering profiles of the sample＇ s surface. The relation between scattering profiles and the angle of incidence is found by analyzing the result measured in the experiment. The way to obtain the parameters of the random surface from the result relies on the study of anisotropy random surface. |
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| Keywords: | anisotropy random surface scattering profiles of light intensity experiment |
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