In~(3+)掺杂SnO_2纳米粉体的制备及气敏性能研究

以自制的SnO2和In2O3为原料,通过固相研磨法制得了一系列掺有In3+的SnO2纳米粉体,利用X射线衍射仪、透射电镜等测试手段对材料的结构、形貌进行了测量和表征.将该材料制成气敏元件,采用静态配气法测试了材料的对Cl2,NO2,H2,H2S,乙醇,甲醛等气体的气敏性能.探讨了掺杂量、工作电压对SnO2粉体材料气敏性能的影响.研究发现:其中当掺杂In2O3的质量分数为3%时,元件在加热电压为3.5 V下对体积分数为30×10-6的Cl2的灵敏度达到3036,而对其他气体几乎没有响应或者响应很小,元件具有较好的响应-恢复特性,响应时间和恢复时间分别是3 s和8 s,最后简要讨论了SnO2对的Cl2气敏机理.

Preparation of In3+-doped SnO2 Nano-powder and Its Gas Sensing Properties

In3+ doped SnO2 nano-powder are prepared by solid state reaction.The microstructure is characterized by X-ray powder diffraction(XRD) and transmission election microscope(TEM).The results indicate that the particle size is small and the crystallization is good.The gas sensor is prepared by this powder and its gas sensitive properties are measured with stationary state gas distribution method.Its gas-sensing properties to Cl2,NO2,H2,H2S,ethanol,acetone,etc are also measured.It is found that when working at 3.5 V,doped with 3% In2O3,the sample has a selectivity of 3036 to 30×10-6 Cl2.At the same time,its selectivity is also good.The response time and recovery time are 3 s and 8 s,respectively.The gas sensing mechanism is also studied.