真空紫外薄膜光学常数的多约束非线性方程组计算

本文推导出目标函数的导数公式，改进了利用“多约束非线性方程组”计算真空紫外光学常数的方法，我们自编了ＶＵＶ－ＲＯＣＰ微机软件，可由真空紫外反射率求出真空紫外薄膜光学常数和入射光的偏振度。运用该软件对不同工艺的Ａｕ、Ｐｔ、Ａｌ样品的反射率进行解析，得到了它们的真空紫外薄膜光学常数，并与国外报道的结果进行了比较。

CALCULATION OF VUV OPTICAL CONSTANTSOF THE THIN FILM BY THE MULTI-RESTRAINEDNONLINEAR EQUATION GROUP

This paper denved denvative formula of target fbnction, impmved tbe raetbod of evaluating VUV optical constants of the thin film by tbe multi-restrained nonlinear equation group. With the belp of our own VUV-ROCP microcomputer programme, we can calculate the VUV optical constants of the thin films and the polariztion degree of incidence light by means of VUV reflectance. Using the progmramme, based on the reflectance of some samples such as gold. platinum and aluminium prepared by different technology, the VUV optrcal constansof the thin films were obtained and compared with the data publiskhed abroad.