微机电系统科学与技术发展趋势

阐明了微机电系统（ＭＥＭＳ）的学科内涵与应用范畴,着重介绍了国外ＭＥＭＳ的研究情况,研究表明微尺度下一些物理现象与宏观世界的存在差别;论述了ＬＩＧＡ加工、刻蚀技术等微制造技术。总结了国内的研究工作,给出了我国在基础理论、材料、工艺、元器件、测试及微系统等方面的研制情况,并提出发展我国微电机电系统的几点建议。

Developing trend of science & technology for micro electro mechanical systems

The connotation and applying area of Micro Electro Mechanical Systems(MEMS) are clarified in this paper. The authors introduce the research achievements in MEMS made by oversea investigators. Some of them found that when the device is shrunk into micron or sub micro dimensions the physics phenomena occur differently. Some micro fabrication technologies such as LIGA processes and etching techniques are discussed. The authors summarize the research work made by Chinese investigators on fundamental theories, materials, technologies, devices, tests, micro systems, etc. Finally, some suggestions for developing MEMS in China are proposed.