离子束轰击钨合金表面碳膜的AES和XPS分析

钨合金是一种重要的合金材料 ,由于它具有密度大、强度高及足够的韧性 ,因此 ,在医疗器械、军工装备等一些特殊使用的器件上有着重要的用途 1 ,2 ] .但在实际使用中发现 ,其表面硬度及其耐磨性能尚有不足之处 3] ,为此我们采用离子束表面强化技术 4～ 6]以改善其表面性能 .具体做法是 :先在钨合金表面利用磁控溅射技术沉积碳膜 ,再用单一的或混合的离子束进行轰击 ,之后通过使用俄歇电子能谱 ( AES)及 X射线光电子能谱 ( XPS)对其表面进行分析研究 .实验结果表明 ,单独使用氮离子轰击可在钨合金表面形成碳化物 ,有利于提高钨合金的表…

INVESTIGATION OF AES AND XPS FOR THE ION BOMBARDED CARBON FILMS ON THE SURFACE OF TUNGSTEN ALLOY

Tungsten alloy with special properties is a useful material in medical and weapon devices.Surface modification of ion technique is used to improve the surface hardness and wear resistance of tungsten alloy,where carbon films deposited with magnetron sputtering on the surface of tungsten alloy were bombarded by ion beam with different species.AES and XPS analyses for these speciment show that tungsten carbide and tungsten nitride were formed due to N- bombardment.Which is beneficial to the Surface hardness and wear resistance of tungsten alloy,but no carbide or no nitride as above with other ion species.Again,ion bombardness leads to mixing between the carbon and tungsten alloy hence improve the adhere of carbon film to the substrate.